F-P頻域干涉測厚儀的設(shè)計







摘要



    近十幾年來，科學(xué)技術(shù)領(lǐng)域所涉及的尺寸精度已突破亞微米級而進入納米級，如超精



密微機械加工、固體物理材料表面特征分析、大規(guī)模集成電路光、電子線路刻劃和微形貌



結(jié)構(gòu)分析、DNA結(jié)構(gòu)的分析等等?？茖W(xué)技術(shù)的發(fā)展呼喚納米級的測量技術(shù)和儀器。因



此，納米測量技術(shù)是納米技術(shù)領(lǐng)域的基礎(chǔ)之一，是當(dāng)今高技術(shù)研究領(lǐng)域的發(fā)展重點。



     本文對F-P頻域干涉測厚儀的各個參數(shù)及結(jié)構(gòu)設(shè)計過程進行了研究，并對影響測量精度、范圍等因素進行了分析，設(shè)計出基本滿足要求的測量厚度的儀器。



通過這次畢業(yè)設(shè)計，我對光學(xué)測量知識又有了全新的理解，對影響光學(xué)測量的因素，如：厚度、測量范圍等都有了進一步的認(rèn)識，同時還初步學(xué)會了幾種繪圖工具使用，能進行一些厚度測量儀器的設(shè)計?？傊?，這次設(shè)計讓我受益匪淺。





關(guān)鍵詞：納米測量；干涉儀；厚度測量。





 





 





 





 





 





 





 





 





 









 



The F-P frequency range interferes the thickness gauge the design



Abstract



In the recent several years, the science and technology domain



involves the size precision broke through the submicron level to enter a nanometer level，If ultra precise micro machine-finishing,solid-state physics material character of surface analysis, large scale integrated circuit light, electronic circuit scoring and micro appearance structure analysis, DNA structure analysis and so on. Science and technology development summon nanometer level survey technology and instrument。Therefore, the nanometer survey technology is one of nanotechnology domain foundations, is now the high-tech research area the development priorities.



This article interfered the thickness gauge to the F-P frequency range



each parameter and the structural design process has conducted the



research，And to affected factors and so on measuring accuracy, scope



has carried on the analysis, designed satisfies the request basically



the survey thickness instrument.



     Through this graduation project, I also had the brand-new under-



standing to the optical measurement knowledge，To affects the optical



measurement the factor，F(xiàn)or example: Thickness, the survey scope and



so on all had the further understanding，Simultaneously has also



initially learned several cartography tool use，Can carry on some



thickness metering equipment the design. In brief, this design lets me



benefit greatly.





Key word: Nanometer survey; Interferometer; Thickness survey.



 





 









目錄



中文摘要 1



英文摘要 2



1 緒論 1



1．1  引言 1



1．2 國內(nèi)外研究情況 2



1． 3 研究內(nèi)容 3



1． 4 研究意義 3



2 幾種測量厚度的方案及原理概述 4



2.1 所采用的研究方案（本次所采用的是方案三） 4



2．2 幾種設(shè)計方案的比較及方案的確定 4



2.2.1 方案一：用白光干涉法測量金屬箔厚度的方法來測量透明平板厚度 4



2.2.2 方案二：用白光干涉法測透明平板的厚度 5



2.2.3方案三： F-P頻域干涉法測量透明平板厚度 8



3 理論知識基礎(chǔ) 10



3．1  法布里-珀羅干涉儀(F-P) ——多光束薄膜干涉的應(yīng)用 10



3.1.1結(jié)構(gòu) 10



3.1.2 作為光譜儀的分光特性 10



3.1.3 F-P干涉儀作為濾光器的選頻作用 12



3．2 多光束干涉與光學(xué)透明平板 13



3.2.1 平行平板的多光束干涉 13



3.2.2 法布里-鉑羅干涉儀 14



3.3 分光元件—光柵的運用 16



3.3.1 光柵方程 16



3.3.2 光柵的色散本領(lǐng) 17



3.3.3 光譜的色分辨本領(lǐng) 17



4 F-P干涉測厚儀的結(jié)構(gòu)設(shè)計 19



4.1 F-P干涉測厚儀的結(jié)構(gòu) 19



4. 2  F-P干涉測厚儀各組件的設(shè)計 19



4.2.1  F-P測厚儀的組成 20



4.2  測試系統(tǒng)結(jié)構(gòu)尺寸的確定 22



5 總結(jié) 23



致謝 24



參考文獻 25