基于貝葉斯算法的批間控制器設(shè)計(jì)

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摘要 隨著社會(huì)經(jīng)濟(jì)的持續(xù)發(fā)展，半導(dǎo)體制造業(yè)也在迅猛增長(zhǎng)。雖然國(guó)內(nèi)外已有關(guān)于混合制程的相關(guān)研究成果，但是有關(guān)批間控制的研究，目前還是主要針對(duì)單一機(jī)臺(tái)上的單一產(chǎn)品；然而在實(shí)際的生產(chǎn)中，由于生產(chǎn)需求的變化和技術(shù)的更新，必定會(huì)增加許多新產(chǎn)品，同時(shí)淘汰許多較舊產(chǎn)品，再考慮到半導(dǎo)體行業(yè)較其他行業(yè)更高的投資，對(duì)設(shè)備的高投入就導(dǎo)致其高利用率，因此對(duì)同一產(chǎn)品同一工序而言，兩個(gè)相鄰的批次在不同的機(jī)臺(tái)上生產(chǎn)的事件完全有可能發(fā)生。這就是所謂的高度混合制程，這種高度混合的生產(chǎn)模式為批間控制的設(shè)計(jì)帶來(lái)很大困難。傳統(tǒng)的建模方法(如傳遞函數(shù))和控制算法(如PID控制)等，都無(wú)法直接適用于這種混合產(chǎn)品生產(chǎn)的制程。批間控制(Run-to-Run Control，RtR Control)是將統(tǒng)計(jì)過(guò)程控制和工程過(guò)程控制相結(jié)合，并且在將其中的統(tǒng)計(jì)過(guò)程控制增添了反饋與前饋機(jī)制。批間控制越來(lái)越廣泛地應(yīng)用于半導(dǎo)體制程，也是半導(dǎo)體制造業(yè)中目前發(fā)展極為活躍的研究方向。
本論文在了解批間控制器基本原理及結(jié)構(gòu)的基礎(chǔ)上，從控制算法和方法兩個(gè)方面對(duì)其進(jìn)行分類。此外，比較了不同批間控制器并且說(shuō)明了各自的優(yōu)缺點(diǎn)。在對(duì)貝葉斯統(tǒng)計(jì)原理及半導(dǎo)體高度混合制程的生產(chǎn)模式深入了解的基礎(chǔ)上，本論文提出了一種基于ANOVA模型和貝葉斯算法的批間控制器設(shè)計(jì)方案。該方案先使用先前觀察結(jié)果遞推計(jì)算出一種概率密度函數(shù)，然后就可以通過(guò)本論文中所推導(dǎo)的相關(guān)公式得出機(jī)臺(tái)與產(chǎn)品的相對(duì)狀態(tài)。該方案不需要求取觀察矩陣的逆，也就大大減少了用求取廣義逆矩陣方法估計(jì)系統(tǒng)狀態(tài)的傳統(tǒng)方案的巨大計(jì)算量。
本論文利用MATLAB仿真工具進(jìn)行2機(jī)臺(tái)3產(chǎn)品的仿真研究。此外，本論文使用IMA(1,1)模型反映實(shí)際生產(chǎn)的擾動(dòng)。與基于線程的EWMA進(jìn)行的對(duì)比中，本論文所提出的方案在輸入階躍擾動(dòng)的情況下，只有一次大的波動(dòng)并且很迅速地就返回到目標(biāo)值，也就證明了本論文所設(shè)計(jì)方案的合理性和正確性。
關(guān)鍵字 貝葉斯統(tǒng)計(jì)理論；高混合制程；批間控制；方差分析


Design of Run to Run Controller using Bayesian Algorithm
Abstract With the rapid development of the social economy, the semiconductor manufacturing industry is also in a rapid growth. Although the research results in China and abroad about the mixing process exist, but the research is always for a single product single tool at present; however, in the actual productive process, due to the changes in demand and the update of technology,many new products will be introduced and many of the old ones to be eliminated.What’s more,Semiconductor trade and investments are higher than other industries, the high investments in equipment have led to its high utilization rate.As a result,it’s entirely possible for the same products in the same process produced in different tools.The process is called the high-mix manufacturing process, the mixed mode of production for the design of control between runs to brings great difficulties.Traditional modeling theory (such as state space representation, transfer function and so on) and the control algorithm (such as PID), the process cannot be directly applied to such processes.Run-to-Run Control combines the advantages of statistical process control and process control,and join feed-forward and feed-back mechanism to the statistical process control.As a result,it has become a hot topic in the semiconductor manufacturing industry in recent years .
In this paper,we learn the basic structure and principle of RtR control.Then,we classify if from two aspects of the control algorithm and control method.The basis of the classification is also introduced. At the same time,we expound the advantages and disadvantages of each category and make the overall comparison.This paper proposed a method based on ANOVA model and Bayesian algorithm . Based on the theory of RtR control, this paper also explain the Bayesian statistic theory, of which the Bayesian algorithm is the key point. Based on the mixing process, using the relevant knowledge of Bayesian statistics theory and ANOVA model, we focus on principles first and illustrate the general steps of using the algorithm.
In this paper,we use the MATLAB simulation.Based on existing theoretical results, we also take the disturbance of IMA(1,1) into consideration,in order to represent the real disturbance in the practical manufacturing process. The result of the waveform analysis of 2 tools, 3 products , compare to the thread EWMA, has proved the rationality and correctness of the proposed method in this paper.

Key words Bayesian statistical theory; high-mix manufacturing process; run to run control; ANOVA


目錄
第一章 緒 論 1
1.1 研究背景與意義 1
1.2 國(guó)內(nèi)外發(fā)展現(xiàn)狀 2
1.2.1批間控制發(fā)展歷程 2
1.2.2 批間控制研究現(xiàn)狀 3
1.2.3 批間控制未來(lái)研究方向 4
1.3 存在問(wèn)題 4
1.4 本文內(nèi)容 6
第二章 批間控制算法理論 7
2.1 批間控制基本原理 7
2.1.1批間控制基本特性 7
2.1.2批間控制基本步驟 8
2.2 批間控制器基本控制結(jié)構(gòu) 9
2.2.1批間控制器基本思想 9
2.2.2 批間控制器基本結(jié)構(gòu) 9
2.3 EWMA批間控制器分類 10
2.3.1 從控制算法進(jìn)行分類 10
2.3.2 從控制方法進(jìn)行分類 15
第三章 基于貝葉斯算法的批間控制器設(shè)計(jì) 18
3.1 貝葉斯統(tǒng)計(jì)原理 18
3.1.1 貝葉斯算法起源 18
3.1.2 貝葉斯算法理論基礎(chǔ) 18
3.2 問(wèn)題提出及解..